FEMTOPRINT offers a 3D microfabrication platform capable of material structuring using arbitrary patterns to produce challenging, monolithic 3D shapes in glass with high precision, sub-micron resolution, and with an additional polishing step, optical surface quality
3D printing of complex micro structures including the capability to chemically post polish the surface to reach optical quality:
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Custom designed complex 3D micro-mechanical glass parts.
Single chips integrating optical, mechanical and fluidic functionalities at the surface, or below it, can be fabricated with a single process on different transparent and chemically inert glasses. Some example of 3D micro-devices already developed are all-optical sensors for high accuracy force/displacement measurement, oscillators with micromechanical flexures and integrated optical components, optically transparent micro-actuators based on capacitive actuations.
CEA-LETI has chosen FEMTOprint to realize a Millimeter-sized particle sensor using a wide field of view monolithic lens assembly for light scattering analysis in Fourier domain.
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